Year-end Sale % OFF 
Abstract
A photoacoustic study of KrF laser heating of Si has revealed that the dominant mechanism of acoustic generation is thermoacoustic with a considerable contribution from the concentration–deformation mechanism at laser fluences below the Si melting threshold of 0.5 J/cm2. Upon Si melting the contraction of the molten material contributes significantly to acoustic generation. At fluences above 1.4 J/cm2 laser ablation of the molten layer enhances the amplitude of the compression pulse and diminishes that of the rarefaction pulse. The results of photoacoustic measurements allow optimization of experimental conditions for dry laser particle removal.
Published Version (
Free)
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
