Abstract

Photopatternable fluorine-containing polyacrylic acrylate prepolymers were synthesized to form amorphous films at room temperature through UV imaging technology. Compared with other conventional low dielectric constant fluorine-containing materials, the synthesized prepolymers exhibit much better compatibility to hydrocarbon solvents and monomers. Their dielectric constants of the cured films are much less than that of the nonfluorinated polyacrylate, and the lowest value could reach 3.23 at 1 MHz. The cured films showed very high transparency, low to 0.61 wt% water absorption and up to 376 °C 5% weight loss temperature. The photopatternability was proved through the formation of the pattern with a resolution of 10 μm.

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