Abstract
Hydrogenated silicon films are prepared on Corning 7059 glass by the plasma enhanced chemical vapour deposition technique with radio frequency ( RF),power,(13.56 MHz) and DC bias. The microstructures of hydrogenated silicon films investigated by Raman spectra. The photo-absorption coefficient is calculated by utilizing an established photo-absorption model. The I-V characteristics of hydrogenated silicon film solar cells are simulated by using software AMPS. The results show that photo-absorption coefficient curves and I-V curves are both consistent well with experimental data. At the same time, the difference between experimental results are calculated results were analyzed.
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