Abstract

We report the results of experimental and theoretical studies of phonon modes in GaN/AlN superlattices (SLs) with a period of several atomic layers, grown by submonolayer digital plasma-assisted molecular-beam epitaxy, which have a great potential for use in quantum and stress engineering. Using detailed group-theoretical analysis, the genesis of the SL vibrational modes from the modes of bulk AlN and GaN crystals is established. Ab initio calculations in the framework of the density functional theory, aimed at studying the phonon states, are performed for SLs with both equal and unequal layer thicknesses. The frequencies of the vibrational modes are calculated, and atomic displacement patterns are obtained. Raman spectra are calculated and compared with the experimental ones. The results of the ab initio calculations are in good agreement with the experimental Raman spectra and the results of the group-theoretical analysis. As a result of comprehensive studies, the correlations between the parameters of acoustic and optical phonons and the structure of SLs are obtained. This opens up new possibilities for the analysis of the structural characteristics of short-period GaN/AlN SLs using Raman spectroscopy. The results obtained can be used to optimize the growth technologies aimed to form structurally perfect short-period GaN/AlN SLs.

Highlights

  • In modern semiconductor devices, short-period superlattices (SLs) are widely used in the active and buffer regions of various heterostructures and have a great potential in quantum and stress engineering

  • We propose an approach that includes a comprehensive group-theoretical analysis of the origin of vibrational SL modes from the modes of bulk AlN and geometry Raman spectra of (GaN) crystals, ab initio calculations of lattice dynamics, and Raman measurements of the phonon modes in short-period hexagonal GaN/AlN SLs

  • Frequency the concentration parameter x n/ m n together with the data on the SL period derived from the frequency of the theoretical analysis made it possible to establish the genesis of the SL phonon modes from the modes of bulk AlN and GaN crystals

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Summary

Introduction

Short-period superlattices (SLs) are widely used in the active and buffer regions of various heterostructures and have a great potential in quantum and stress engineering. A joint analysis of the theoretical and experimental results makes it possible to establish the microscopic nature of the vibrational states associated with the lines in the Raman spectra, which is the basis for the development of a quantitative technique for assessing important parameters of the studied SLs. The existence of localized and delocalized modes in GaN/AlN SLs at the frequencies different from the frequencies of any mode inherent in the layers composing the SL was theoretically predicted within the framework of the dielectric continuum model [15,16]. The results of such an integrated approach can be useful for obtaining new information on the microscopic nature of phonon SL modes and establishing correlations between the structure of the SL and the observed features in the Raman spectra, which can be used to optimize the parameters of the growth process in order to form structurally perfect short-period GaN/AlN SLs

Experimental and Calculation Details
Growth
Most ofaaGa
Group-Theoretical Analysis
Low Energy Phonon Modes
The atomicpatterns displacement patterns of longitudinal
Raman frequencies and intensities of the symmetry
Calculated
10. Calculated and experimentally experimentally determined frequencies of Amodes
12. Frequencies andand
Conclusions
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