Abstract
Numerical simulations of the influence of the phase step miscalibration and average intensity changes between the registered frames on the time-averaged interferogram contrast calculated using the temporal phase-shifting (TPS) method are presented. The amplitude of sinusoidal vibration studied by the time-averaged method is encoded in the interferogram contrast or intensity modulation described by the zero-order Bessel function. The properties of the TPS method used for contrast determination are established. Experimental studies of vibration mode patterns of silicon microelements with specular reflection surfaces provide corroboration of theoretical and numerical findings.
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