Abstract

Phase shifting interferometry has become an important part of optical measurement field. In this paper, we described the phase shifting measurement principle, the analyzer interference model and the typical phase unwrapping methods. A novel phase unwrapping algorithm based on K-means clustering was proposed, and its calculation method and design process provided in order to complete three-dimensional morphology measurement. In the end, the algorithm was validated by experimental analysis of the standard sample that were consistent with the nominal and practical calibration values.

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