Abstract
The variation in the atomic composition of thin CuO films under irradiation by proton beams with different doses was experimentally studied by X-ray photoelectron spectroscopy (XPS), electron energy loss spectroscopy (EELS), and high resolution transmission electron microscopy (HRTEM). The chemical composition and corresponding changes of crystal phases were found after proton irradiation at various doses according to the XPS, EELS, and HRTEM data. It was demonstrated that the selective removal of oxygen atoms was accompanied by a phase transition to Cu2O during the gradual recovery of the virgin CuO.
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