Abstract
This work presents a study of the evolution of the phases in the intermediate heat treatment process (IHP) which was after the pyrolysis process and before the crystallization of YBCO superconducting thin films. It was shown that the evolution of the solid solution could always take place whether with or without water vapor and oxygen. When water vapor is present in the atmosphere, the evolution temperature of the intermediate phase was lower than the one without vapor. The intermediate phase of Y2Cu2O5 with the vapor was observed at 680 °C. By calculating the changes of Gibbs free energy of reactions possibly involved in the IHP, the priority reaction with water vapor was CuF2>YF3>BaF2 when CuF2, YF3, and BaF2 coexisted while CuF2 and YF3 prefer to react with BaO to form BaF2 while they coexisted. The appearance of intermediate phase features could be illustrated through the calculation.
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