Abstract

WO 3 thin films have been annealed in air in the temperature range 20–450 °C and the changes in grain size and crystallographic structure have been investigated as a function of the annealing conditions. During annealing, important changes in grain size and structure occur and have been characterised by electron microscopy and electron diffraction. As the annealing temperature increases, the monoclinic structure successively transforms to WO 3· 1/ 3H 2O phase, hexagonal WO 3, WO 3− x (Magneli phases) and monoclinic WO 3. The formation of WO 3− x was only observed when the thin film was annealed on its substrate. This non-stoichiometric WO 3− x phase exhibits specific fringe contrast imaging of well-ordered crystallographic shear planes. The most frequent Magneli phase we have observed corresponds to the W 40O 118 structure.

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