Abstract

Nanoindentation-induced phase transformations have been studied in amorphous Ge thin films. These films initially tend to deform via plastic flow of the amorphous phase under load but at a critical pressure a sudden phase transformation occurs. This transformation, to a soft metallic (β-Sn-like)-Ge phase confined under the indenter, is signified by a “pop-in” event on loading. Following “pop-in,” the indentation tests fall into two distinct types of behavior. In one case, the rate of deformation with increasing load after “pop-in” increases, and the observed end-phase following complete unloading is observed to be predominately diamond-cubic Ge. In the other case, the deformation rate (slope of the loading curve) remains the same as that before “pop-in,” and the end phases following unloading are found to contain predominantly unstable r8 and more stable hexagonal Ge phases. The different transformation pathways for these two cases are shown to be related to the probability that the soft (β-Sn-like)-Ge phase volume, which suddenly forms at the transformation pressure, is either unconstrained by the indenter tip (the first case) or totally constrained under the indenter tip (in the latter case).

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