Abstract
The paper reports on a phase transformation in sputtered Ti–SS (stainless steel) alloy film during its plasma nitriding. First, it is shown that a Ti–SS film containing of about 9.5 wt.% of Fe is, when magnetron sputter deposited at low substrate temperatures below 100°C, a high-temperature cubic β-Ti phase film. A formation of high-temperature structure is due to a `mixing effect', i.e., to an addition of Fe to Ti. During plasma nitriding of high-temperature cubic β-Ti phase film, an opposite process takes place. The amount of Fe in the Ti–SS film reduces due to a formation of iron nitride γ′–Fe 4N. A depletion of Fe in the Ti–Fe alloy results in a phase conversion. The high-temperature cubic β-Ti phase converts into a low temperature hexagonal α-Ti phase when the amount of Fe decreases below a minimum value necessary to sustain a high temperature structure of Ti–SS alloy film. The plasma nitriding was carried out in an anomalous glow discharge in a mixture of N 2+H 2 at the total pressure 1067 Pa for 2 h at 550°C.
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