Abstract

A concept of phase-sensitive Si-based Total Internal Reflection bio- and chemical sensor is presented. The sensor uses the reflection of light from an internal edge of a Si prism, which is in contact with analyte material changing its index of refraction (thickness). Changes of the refractive index are monitored by measuring the differential phase shift between p- and s-polarized components of light reflected from the system. We show that due to a high refractive index of Si, such methodology leads to a high sensitivity and dynamic range of measurements. Furthermore, the Si-based platform offers an easy bioimmobilization step and excellent opportunities for the development of multi-channel microsensors taking advantage of the advanced state of development of Si-based microfabrication technologies.

Highlights

  • Refractive index (RI) of a physical or chemical substance is a fundamental parameter, which characterizes its optical properties and can give important information on its condition [1]

  • Such monitoring requires evanescent wave excitation, which can be achieved in total internal reflection (TIR) or Surface Plasmon Resonance (SPR) geometry

  • We show that the phase sensitivity in TIR geometry can be drastically improved by using Si-based TIR geometry

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Summary

Introduction

Refractive index (RI) of a physical or chemical substance is a fundamental parameter, which characterizes its optical properties and can give important information on its condition [1]. Such monitoring requires evanescent wave excitation, which can be achieved in total internal reflection (TIR) or Surface Plasmon Resonance (SPR) geometry. Since SPR provided a higher reflectivity-based sensitivity due to essentially resonant nature of sensing response [3,4], it has been much more frequently used in biological and chemical sensing compared to TIR-based implementations [5,6].

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