Abstract
An algorithm to characterise multilayer optical coatings with large numbers of layers by spectroscopic ellipsometry, using a discrete spectral-zone fitting approach, has been demonstrated by characterising a 27-layer TiO 2/SiO 2 multilayer beam combiner in the wavelength range of 280–1200 nm. The ellipsometric spectra are fitted first in the wavelength regime of 700–1200 nm and the sample structure was determined. TiO 2 and SiO 2 layers have been assumed to be transparent in this wavelength regime with dispersion-less refractive indices. The data were then fitted in the wavelength range of 280–340 nm to find the dispersion relation for the optical constants of TiO 2. Finally, the fitting has been done in the wavelength range of 340–700 nm and the true dispersion of refractive index of TiO 2 along with the best fit sample structure have been obtained.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
