Phase measuring deflectometry based on calibration of the entrance pupil center of the camera lens.

Abstract

A camera calibration method for phase measuring deflectometry (PMD) based on the entrance pupil center (EPC) of the camera lens is proposed. In our method, the position of the entrance pupil of the camera lens is first measured; next the absolute coordinates of the EPC are calibrated by using a reference flat and an external stop that is mounted in front of the camera lens; then the EPC as the camera coordinates is used for PMD. The feasibility of the proposed method is verified by simulation. The surface shapes of a planar optical element and a planar window glass are separately measured in our experiments, and a subwavelength accuracy level is achieved. Meanwhile, the effects of the camera lens with different aperture settings on captured images are investigated (including exposure time, image contrast, and measurement accuracy). The experimental results show that the exposure time required declines with the decrease in the f-number, and the measurement accuracy is higher than others when the f-numbers are changed from f/5.6 to f/11.