Abstract
Feedback interferometers are described with specific reference to potential applications in micro-machines. A theoretical analysis is developed to determine the linearity, stability, and noise performance of this type of interferometer. The theoretical analysis was tested using a prototype high-precision feedback interferometer which showed that, at a feedback loop gain which enabled the system to track 6 fringes, the linearity of the interferometer was better than λ/100 and single phase measurements could be made with an accuracy of λ/80.
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