Phase formation at rapid thermal annealing of Al/Ti/Ni ohmic contacts on 4H-SiC

Abstract

Ohmic contacts to the top p-type layers of 4H-SiC p +–n–n + epitaxial structures having an acceptor concentration lower than 1×10 19 cm −3 were fabricated by the rapid thermal anneal of multilayer Al/Ti/Pt/Ni metal composition. The rapid thermal anneal of multilayer A1/Ti/Pt/Ni metal composition led to the formation of duplex cermet composition containing Ni 2Si and TiC phases. The decomposition of the SiC under the contact was found to be down to a depth of about 100 nm. The contacts exhibited a contact resistivity R c of 9×10 −5 Ω cm −2 at 21°C, decreasing to 3.1×10 −5 Ω cm −2 at 186°C. It was found that thermionic emission through the barrier having a height of 0.097 eV is the predominant current transport mechanism in the fabricated contacts.