Abstract
Synthetic aperture has been a common method in digital holographic microscopy resolution enhancement over the years. Multiangle illumination is one type of synthetic aperture methods. Reconstructed phase errors appeared when synthesizing aperture not considering the difference between different inclined incident beams' reconstruction distances. To reduce phase errors, this paper proposes a method using different reconstruction distances in inclined incident beams to achieve synthetic aperture resolution enhancement. A multiangle illumination reflectance digital holographic microscopy system is built to prove this method. The reconstruction distances can be calculated theoretically to compute the phase image. The phase image errors can be remarkably reduced by using the proposed method by analyzing the experimental result.
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More From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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