Abstract
Based on the wave optical theory of image formation the wave function of a single atom, consisting of the complex scattering amplitude and the phase shift due to spherical aberration, is rigorously obtained as a function of defocus by use of the Kirchhoff diffraction integral in the Fraunhofer approximation. By using this function, the variation of phase contrast with focus in images of layers of tungsten atoms is simulated with the aid of a computational algorithm in an on-line graphic computer system. Model layers are constructed by the Monte-Carlo method, making use of the interatomic size distribution measured from electron diffraction patterns. The computed images are similar in some areas to electron micrographs of films of tungsten, prepared by ion bombardment, which are thin enough to serve as supporting films in high resolution electron microscopy.
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