Abstract
Three laser systems that are being developed for use in X-ray generation which incorporate SBS phase conjugate mirrors are described. A 25 J/pulse Nd:glass laser is being developed for commercial proximity print X-ray lithography; a 0.5 J/pulse, 1.3 kHz pulse repetition frequency laser is being built for soft X-ray projection lithography; and a 1 kJ/pulse laser driver for a table top X-ray laser has been designed. The results of prototypical experimental investigations are presented and the basic design principles for high average power phase conjugated laser systems shared by each of these lasers are discussed.
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