Abstract
Electron diffraction was used to study the formation of phases in a Bi-S system. It is shown that the phase with composition Bi2S3 appears as result of consecutive deposition of Bi and S irrespective of the order of deposition; this phase also appears in the case of simultaneous deposition of components. The films formed at room temperature are amorphous. Amorphous thin Bi2S3 films are stable at room temperature and crystallize at temperatures in the region of ∼423 K. The conditions for formation of Bi2S3 films with different substructures are established.
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