Abstract
100-oriented epitaxial Pb(Zr,Ti)O3 [PZT] films with various Zr/(Zr+Ti) ratios from 0 to 0.8 were grown on (100)c SrRuO3∥(100) SrTiO3 and (100)c SrRuO3∥(100) LaNiO3∥(001) CaF2 substrates. 200-nm-thick films grown on CaF2 substrates consisted of a pure tetragonal phase up to the Zr/(Zr+Ti) ratio of 0.8. On the other hand, the phase of the films on SrTiO3 substrates changed from pure tetragonal below the Zr/(Zr+Ti) ratio of 0.4 to rhombohedral above the Zr/(Zr+Ti) ratio of 0.6 through their mixture phase within the Zr/(Zr+Ti) ratio range from 0.4 to 0.6. The larger polarization value was observed to be lager for PZT films on CaF2 substrates than for PZT films on SrTiO3 substrates for all Zr/(Zr+Ti) ratios and was in good agreement with the estimated one assuming tetragonal symmetry. The tetragonal region can be expanded to a Zr/(Zr+Ti) ratio of 0.8 below 1 µm in thickness for films on CaF2 substrates. The present results show that the large thermal strain induced by CaF2 substrates having with a large thermal expansion coefficient can expand the tetragonal symmetry region up to large a Zr/(Zr+Ti) ratio and thicker films.
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