Abstract
The phase and texture of of Er–germanide formed on through a solid-state reaction between Er thin films and via rapid thermal annealing (300–) were investigated. It was found that amorphous forms at , followed by the formation of hexagonal at 400– and then orthorhombic at . X-ray diffraction pole figure measurement revealed that the films formed at 400– consist predominantly of epitaxial grains with an orientation relationship of , although the presence of a considerable amount of epitaxial grains with an orientation relationship of was also observed in the film formed at . The germanide film formed at was found to consist of randomly orientated orthorhombic grains. Among the three different germanide phases, showed minimum resistivity values as low as .
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