Phase analysis and microwave dielectric properties of LTCC TiO2 with glass system

Abstract

Abstract Glass–ceramic composites containing TiO 2 (anatase, rutile) and modified borosilicate glasses were prepared and their sintering behaviour, phase evolution, interface reactions, and microwave dielectric properties were investigated as new candidates for low-temperature cofired ceramic (LTCC) materials. It was found that the addition of small amounts of borosilicate glasses lowered the sintering temperature of TiO 2 from 1400 to 900 °C. X-ray diffraction results showed that second phases, including Zn 2 SiO 4 , were formed when TiO 2 +zinc-borosilicate glass was used, while no crystalline phase except rutile could be found using unmodified borosilicate glass. High-density TiO 2 +zinc borosilicate glass material showed promising microwave dielectric properties: relative dielectric constant ( e r )=74, quality factor ( Q × f )=8000 GHz, and temperature coefficient of resonant frequency ( τ f )=340 ppm/°C. The effect of borosilicate glasses on the anatase–rutile phase transition was also investigated.