Abstract
A pH sensor is designed with a principle based on the differential measurements between two electrically insulated pH-FETs. An analog feedback system controls the transistors, which are working in the constant-charge mode. Ta 2O 5 and oxynitride are the pH-sensitive layers. For measurements in biological systems, we use two pH-FETs with the same pH-sensitive layer and an enzyme (urea) immobilized on one transistor.
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