Abstract
Spherical aberration (SA) compensation of a laser beam is necessary in order to maintain the recording and reading quality in the Blu-ray disc^<TM> system. We have already demonstrated the principle of the microelectromechanical systems (MEMS) deformable mirror as a spherical aberration compensator. The deformable mirror is a smaller and less costly alternative to the conventional moving lens system. However, for practical use, an important issue still needs to be addressed: how to make the deformation of an elliptical parabolic mirror correspond to the obliquely incident laser beam. In this report, we proposed and demonstrated a elliptical deformable mirror that is applied for an obliquely incident laser beam.
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