Abstract
In this study, we developed the new deposition method of Perfluoropolyether(PFPE) lubricant on diamond like carbon(DLC) overcoat by the photoelectron assisted chemical vapor deposition(PAcvd).Pfpe lubricant in vapor phase was deposited on DLC surface of magnetic disks with a RF pulse bias voltage between a disk surface and a counter electrode above disk surface during the ultra violet(UV) irradiation. Then, we evaluated the thermal stability for the laser beam heating and the corrosion resistance of magnetic disks with lubricant film deposited by PACVD. These disks showed higher thermal stability and high corrosion resistance than Z-tetraol lubricant film, because the lubricant film deposited by PACVD has no hydrocarbon segment in the molecular structure and has much high water repellency.
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