Abstract
Polyethylene terephthalate (PET) film drilling using a 248 nm excimer laser through photomask projection is presented. The parameter effects of laser fluence, shot number and repetition rate on the processing results are examined. A high quality microhole array with 50 μm thick PET film is fabricated. When the projection process is carried out, the diameter differences in the microhole in the front and back side of PET are observed. This causes a conical shape in the kerf. The formation of this conical shape in terms of the laser process parameters is discussed. The process parameter effects are investigated and characterised to improve the PET microhole laser machining quality.
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