Abstract
Suppression of nonlinear signal generation in radiofrequency (RF) surface and bulk acoustic wave devices is one of the most important subjects for the RF front-end modules of recent cellular handsets. In particular, issues with second-order nonlinear products of bulk acoustic waves are well known. In this work, we succeeded in extracting the dominant parameters for second-order nonlinear analysis proposed by Hashimoto et al. [Joint Conf. European Frequency and Time Forum and IEEE Freq. Cont. Symp., 2017, p. 538] and verified that it is applicable in a wide frequency range and also effective for film bulk acoustic resonator (FBAR) device design. Combining the extracted nonlinear coefficients on the perturbation analysis by driving near the fundamental frequency (f0) and half resonant frequency (1/2f0) of the FBAR could reproduce second-order nonlinear characteristics in a wide frequency range. It was also confirmed that the proposed simulations are in good agreement with measurement results for various types of resonators and FBAR filters.
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