Perspectives of the VGF growth process for the preparation of low-defect InP substrate crystals

G Muller,D Hofmann,N Schafer

doi:10.1109/iciprm.1993.380710

Perspectives of the VGF growth process for the preparation of low-defect InP substrate crystals

G Muller, D Hofmann + Show 1 more

https://doi.org/10.1109/iciprm.1993.380710

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Publication Date: Apr 19, 1993

Citations: 3

Affiliation: University of Erlangen-Nuremberg

#Vertical Gradient Freeze #Liquid Encapsulated Czochralski + Show 8 more

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Abstract

The current status of LEC (liquid encapsulated Czochralski)-type growth processes and vertical gradient freeze (VGF)-growth of InP substrate crystals is reviewed. The twinning problem presently limiting the VGF potential is discussed and strategies to overcome this defect are considered. A new type of VGF multizone furnace is introduced. VGF processing under defined thermal and constitutional boundary conditions in this apparatus based on a recently developed global numerical model offers new perspectives for the growth of low-defect InP single crystals. >

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