Abstract
Ba-ferrite thin films are deposited on a SiO/sub 2//Si wafer substrates by facing target sputtering followed by post deposition annealing in the range of 700/spl deg/C to 900/spl deg/C for 1 hour. The effect of ultra thin Al toplayer on the crystallographic and magnetic properties of the films are studied by X-ray diffraction and vibration sample magnetometer measurements, respectively. Surface morphologies and nanostructures are examined by scanning electron microscopy. The results showed that the saturation magnetization values as a function of the annealing temperature are higher for the films with Al toplayer than that of the film without Al toplayer.
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