Abstract
Micro-robotics is a burgeoning field, with potential applications in search and rescue, smart dust, advanced additive manufacturing and micro-surgery. A critical component enabling micro-robotic systems is efficient actuator materials. In this work we introduce thin films of NdNiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> , a prototypical perovskite nickelate, as a potential material for MEMS actuation, providing up to 6.0% tensile volumetric strain via hydrogen-ion intercalation, resulting in an experimentally demonstrated output work density of 6.7 J/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> and stress output in excess of 1.1 GPa via a unique hydrogen doping mechanism. Separately, a stiffened cantilever array is fabricated to measure experimental tip deflection, which matches expected deflections from a developed finite element analysis model. [2020-0330]
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