Abstract

The behavior of permeation of deuterium through niobium under the condition of radio-frequency plasma has been investigated in this paper. The external solenoid coupled plasma was applied as plasma source. The dependences of stable permeation flux on mode of discharge, membrane temperature, input power, gas pressure, surface oxidation layer and impurity concentration have been studied. The bulk diffusion was one of the controlling steps with 0.5 mm membrane and the substantially increase was due to plasma assisted dissociation. The mixtures with large amount of argon or nitrogen had finite influence on stable permeation flux which was attributed to the ion energy driven dissociation at surface. These results imply the inductively coupled plasma driven permeation is beneficial to rapid separation and purification of hydrogen isotopes for low surface sputtering rate of membrane surface and gases with hydrogen-containing compounds.

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