Abstract
We report on the periodic air-nanoplate-embedded omnidirectional reflectors (ODRs) to enhance the efficiency of AlGaN-based ultraviolet (UV) emitters composed of periodic quarter-wavelength-thick air-nanoplates/Al reflective layer and indium tin oxide (ITO) mesh ohmic layer. To enhance the photon extraction efficiency (PEE) of UV emitter by increasing the volume of air in ODRs, the coverage of the air-nanoplates in ODRs could be increased to 70% per chip. The optical output of UV emitter with 70% coverage of air-nanoplate was significantly improved by the Lambertian enhancement of 28.7% at an injection current of 10mA, compared with that of ITO film/Al UV emitter.
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