Abstract
Piezo-pumps, in the last decade, have received extensive attention because of their potential applications in biomedical devices, biological and chemical analysis, micro-electronics cooling and space exploration. In this paper an analytical model is developed to analysis the parameters effect on the pump flow. The micro-pump driven by piezostack (PZT alloy multilayer) as actuator is studied as function size and working middle. This one is compared with SCMCP pump actuated by PZT alloy as piezomembrane. The flow change as a function frequency, the chamber diameter and control voltage are analyzed. The simulation results obtained with two different liquids (water and blood) as working middle are discussed and compared with experimental results. The results are satisfactory.
Highlights
The micro-pump driven by piezostack (PZT alloy multilayer) as actuator is studied as function size and working middle. This one is compared with serial-connection multi-chamber piezoelectric micropumps (SCMCP) pump actuated by PZT alloy as piezomembrane.The flow change as a function frequency, the chamber diameter and control voltage are analyzed
With the development of micro-electro-mechanical system (MEMS), the piezoelectric pumps have been emerged as a popular area of research
For the serial-connection multi-chamber piezoelectric micropumps (SCMCP) [7], the working principle of the diaphragm pump can be described as a periodic process
Summary
With the development of micro-electro-mechanical system (MEMS), the piezoelectric pumps have been emerged as a popular area of research. They have received extensive attention because of their potential applications in biomedical devices, biological and chemical analysis, microelectronics cooling, fuel-drop generator for automobile heaters and space exploration [1,2,3]. Many piezoelectric pumps are developed using piezoelectric membrane actuators (named piezomembrane pumps) for liquid delivery They are characterized by their simple structure and small volume. For a good control of the liquid delivery system, the mathematical model of the piezopump must be mastered In order to validate the model, the simulation results are compared with the experimental results obtained by others researchers
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