Abstract
In this paper we demonstrate the capabilities of our mixed-signal, multi-domain system level simulation tool, Chatoyant, to model and simulate an RF MEMS shunt switch. We verify our mechanical simulations and analysis by comparison to results from commercial simulation packages, ANSYS and CoventorWare. We show that our modeling accuracy and simulation speed are comparable to these commercial tools for specific analysis. We conclude by showing the unique capabilities of a system tool based on a modular hierarchal approach that allows one to model not only the individual components of the system but also the subtle interactions resulting in specific system behaviors.
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