Abstract

Beamline BL-11D of the Photon Factory was recently opened for the characterization of extreme-ultraviolet and soft X-ray optical components. For reflectometry of multilayers for soft X-ray microscope optics, a small focus size on the sample surface matching the small acceptances of the curved multilayer samples is required. The post-focusing mirror system of BL-11D is composed of horizontally and vertically focusing elliptical mirrors. The performance was evaluated by microscopic beam profile observation, by a knife-edge scan test, and by the Ronchi test. The FWHM beam size was 120 μm (H) × 30 μm (V) with an insignificant spherical aberration, which is smaller than the requirement.

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