Abstract
In this paper, the characterization and analysis of a silicon micromachined Quad Mass Gyroscope (QMG) in the rate mode of operation are presented. We report on trade-offs between full-scale, linearity, and noise characteristics of QMGs with different Q-factors. Allan Deviation (ADEV) and Power Spectral Density (PSD) analysis methods were used to evaluate the performance results. The devices in this study were instrumented for the rate mode of operation, with the Open-Loop (OL) and Force-to-Rebalance (FRB) configurations of the sense mode. For each method of instrumentation, we presented constraints on selection of control parameters with respect to the Q-factor of the devices. For the high Q-factor device of over 2 million, and uncompensated frequency asymmetry of 60 , we demonstrated bias instability of /r and Angle Random Walk (ARW) of / in the OL mode of operation and bias instability of /r and ARW of / in the FRB mode of operation. We concluded that in a realistic MEMS gyroscope with imperfections (nearly matched, but non-zero frequency asymmetry), a higher Q-factor would increase the frequency stability of the drive axis resulting in an improved noise performance, but has challenges in implementation of digital control loops.
Highlights
We presented the performance analysis of Coriolis Vibratory Gyroscopes (CVGs) devices, designed to operate in the rate mode in the nearly mode matched configuration
We demonstrated a possibility of achieving 0.09 °/hr bias instability and a 0.01 °/ hr Angle Random Walk (ARW) in the rate mode of operation in lab conditions, with no thermal compensations on the device level
We described the structure of the CVG control algorithm and highlighted the hardware requirements for implementation
Summary
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. Four outer lever synchronization mechanisms and four pairs of inner secondary beam-coupling elements were incorporated in the suspension design to couple the proof-masses (see Figure 4) Advantages of these features of the design included widening of the frequency separation between desired anti-phase modes and parasitic in-phase modes, while shifting the in-phase modes to higher frequencies for common mode rejection of linear accelerations, decreasing the mode conversion losses and decreasing the drift induced by external vibrations. While the anti-phase operation was intended to reduce the energy dissipation and improve the Q-factor along each orthogonal axis, the symmetric structure of the device provided a damping and stiffness symmetry, which was shown to improve the overall performance of the gyro operating in both the rate and the rate-integrating modes [18]. These electrodes were wirebonded, such that they summed under the same subset (e.g., the Dx+ signal arrives in the LCC package to 4 different pads and distributes to 4 electrodes)
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