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Abstract
Nanoelectromechanical systems (NEMS) have been utilized as sensitive mass sensors in many applications such as single cell characterization, volatile organic biomarker detection and single molecule mass spectrometry. Using the frequency shift detection, mass of single analytes can be resolved. Mass detection sensitivity can be further improved by accurate measurement of the position, unlocking extra capabilities in nanoscale positioning and manipulation applications. Here, we studied the position sensing performance of two-mode NEMS resonators during detection of single 20 nm gold nanoparticles (GNPs). By recording the position of each particle with frequency shift sensing, the position detection accuracy was evaluated for different beam models and the results are validated by SEM imaging Our results indicate that the position sensing accuracy, and therefore the mass sensing accuracy, of nanomechanical resonators depends critically on the use of appropriate beam models.
Highlights
The potential of mass sensing with Nanoelectromechanical systems (NEMS) devices was recognized in the early 2000s (Ekinci et al, 2004a,b; Ilic et al, 2004)
I.e., mode shape, changes along the device, analytes arriving at sensor locations with larger motional amplitude will induce a larger frequency shift than identical analytes arriving at locations with smaller vibration amplitude, e.g., near an anchor point or a node (Ramos et al, 2006, 2007; Stachiv et al, 2012)
The comparison between the position values obtained through SEM imaging and frequency shift measurements are shown in Figures 3, 4 for two resonators with 15 and 20 μm lengths, respectively
Summary
The potential of mass sensing with NEMS devices was recognized in the early 2000s (Ekinci et al, 2004a,b; Ilic et al, 2004). Bottom-up NEMS devices have been used in significant demonstrations such as obtaining atomic mass through shot noise statistics (Jensen et al, 2008), detecting single molecules (Chiu et al, 2008; Lassagne et al, 2008), and eventually reaching yoctogram-level resolution (Chaste et al, 2012). In these studies, the analyte has been modeled as a soft particle with a fixed stiffness (Tamayo et al, 2006; Park et al, 2010; Malvar et al, 2016). I.e., mode shape, changes along the device, analytes arriving at sensor locations with larger motional amplitude will induce a larger frequency shift than identical analytes arriving at locations with smaller vibration amplitude, e.g., near an anchor point or a node (Ramos et al, 2006, 2007; Stachiv et al, 2012)
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