Abstract
Beam steering in phased arrays is normally achieved using RF phase shifters [1]. They provide inter-element phase shifts, independent of the other system components, in the form of insertion phase delays. Consequently, they also introduce insertion loss in the process. The magnitude of the loss is dependent on the phase shifter type and generally increases with frequency. Many types of phase shifters have been studied in past years including Ferrite and solid-state phase shifters [2]. In recent years, several groups have investigated micro-electro-mechanical-systems (MEMS) switch based phase shifters [3]. MEMS based phase shifters can offer a high phase shift at very low series resistance. A new type of phase shifter formed from a reconfigurable microstrip structure, using MEM copper membranes distributed in the ground plane below the transmission line was presented in [4].
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