Performance of hard x-ray zone plates at the advanced photon source

Abstract

Fresnel zone plates have been highly successful as focusing and imaging optics for soft x-ray microscopes and microprobes. More recently, with the advent of third-generation high-energy storage rings, zone plates for the hard x-ray regime have been put to use as well. The performance of zone plates manufactured using a combination of electron-beam lithography and x-ray lithography is described.