Abstract
Upgrading the long trace profiler at NSRRC has enabled measurements on mirrors in the beamlines with increased precision. The following working items are included: a 2D CCD detector and its upgraded software, improved straightness of the sliding stage of air bearings, calibration of the system linearity, control of air turbulence in the optical path and some upgraded optics. The factors influencing the stability and accuracy were studied and improved with engineering schemes. Measurements of highly precise flat mirrors and strongly curved mirrors were performed and are discussed.
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