Performance of a local electrode atom probe

Abstract

AbstractThe performance of a local electrode atom probe with a crossed delay line detector has been characterized. The local electrode atom probe with its short flight path and high speed (up to 250 kHz) pulse generator has made dramatic, orders of magnitude improvements in the data acquisition rate and the size of the analyzed volume compared to previous types of three‐dimensional atom probes. Sustained detection rates of up to 17% ions per field evaporation pulse have been achieved with data collection rates of up to 2 million atoms per minute. Preferential evaporation is substantially reduced due to the smaller proportion of time spent at the standing voltage enabling lower pulse fractions to be routinely used. A procedure for aligning the specimen with the aperture in the local electrode is described. Published in 2007 by John Wiley & Sons, Ltd.