Abstract
The paper describes the newest layouts and the basic properties of pyroelectric single-element detectors and linear arrays with up to 512 responsive elements which are built on the basis of lithium tantalate. The research aimed to develop detectors with a signal-to-noise ratio that is as high as possible thereby ensuring optimum adjustment of the detectors to their planned application. Typical applications can be found in pyrometry, gas analysis, spectrometry and security technique. It is shown that special technologies (e. g., ion beam etching, absorption layers) are used to manufacture responsive elements for detectors with very high signal-to-noise ratios. For example, a specific detectivity D* (500 K; 10Hz; 1 Hz; τ<sub>W</sub>=1) ≥ 1.5 x 10<sup>9</sup> cmHz<sup>1/2</sup>W<sup>-1</sup> has been obtained for single-element detectors with a responsive area of [2x2] mm<sup>2</sup>. The measured peak value of the NEP for a linear array with 256 responsive elements was smaller than 0.5 nW (128 Hz). Moreover, the acceleration responsivity (disturbance variable) of the examined detectors was fundamentally reduced (factor 5) thanks to the application of new chip and detector layouts.
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