Abstract
To suppress the hysteresis effect of the magnetostrictive film coated surface acoustic wave (SAW) current sensor, a patterned design on magnetostrictive FeCo coating was performed in this contribution. The developed sensor was composed of a configuration of dual-delay-line oscillators, and a strip-patterned magnetostrictive FeCo coated onto the SAW propagation path of the sensing SAW device. The patterned FeCo produced magnetostrictive strain under the electromagnetic field, generating changes in the thickness, density, and Young's modulus of the FeCo film, then the SAW propagation characteristic was modulated in the form of a linear SAW velocity shift, and the corresponding change in differential oscillation frequency was used to evaluate the applied current. The design of striped pattern with strip width of 2λ (λ: wavelength) and strip spacing of 1λ was conducted for sensing chip, and the chips were fabricated by RF magnetron sputtering deposition and overlay lithographic technique. By using the experimental setup made by the Helmholtz coil system, favorable sensitivity, excellent linearity, and lower hysteresis error were obtained from the developed SAW current sensor with strip-patterned FeCo coating in the experiments.
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