Abstract

In this paper, the compression model and shear model for high temperature piezoelectric accelerometer based on the CTGS and YCOB crystal cuts were studied. Based on the piezoelectric equation, the sensitivities (S) of the compression-mode and shear-mode accelerometer were derived and results shown that sensitivities S were affected by the piezoelectric constants d 33 /d 11 and d 26 /d 15 both for the compression-mode and shear-mode accelerometers. Temperature dependence of the piezoelectric constants was studied from room temperature to 800oC by the impedance analyzer, and the optimum crystal cuts with larger piezoelectric constant and good temperature stability were designed. It was found that for YCOB crystals, the variations of effective piezoelectric d 33 and d 26 could be optimized to be 26 can be optimized to <7% over the whole temperature range. These results are helpful for designing high temperature piezoelectric accelerometers based on the CTGS and YCOB crystals.

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