Abstract
A low-cost hybrid electro-optic (EO) material with a high EO coefficient and excellent poling stability is used as the basis for a conventional Mach–Zehnder interferometer modulator with a strip-loaded waveguide structure, and thorough modeling, design and fabrication processes are proposed. To improve the performance of this strip-loaded EO modulator, a simple photobleaching technique is introduced into the fabrication process. Using this design, the confinement is increased by a factor of 1.71, and coupling loss reduction of 2.3 dB per facet is obtained at the same time. The device exhibits an insertion loss of 8.9 dB and an EO coefficient of 20.9 pm/V at 1550 nm with stable operation. This waveguide structure and the fabrication process are shown to be valuable for EO modulators and switches application.
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