Performance enhancement of MEMS-guided four beam piezoelectric transducers for energy harvesting and acceleration sensing

Abstract

In the present paper, guided four beam (G4B) piezoelectric transducers with enhanced sensitivities have been designed. Based on the suggested G4B structures, piezoelectric energy harvesters (PEHs) and acceleration transducers with higher voltages than their previously reported counterparts and with lower displacements than the single-cantilever PEHs (SC-PEHs) have been proposed. We have shown that it is possible to arrive at much more output voltages in comparison with the conventional PEHs by redesigning the structure of the cantilever beams. In 1 g acceleration, the maximum output voltage obtained from the proposed PEHs has been 13.49 V whereas the output voltage for the conventional G4B-PEH is 2.87 V. This paper for the first time proposes G4B-PEHs with smaller displacements and larger voltages compared to a SC-PEH. The same G4B framework has been studied as a piezoelectric acceleration transducer. The effect of piezoelectric length on the extracted voltage in both unimorph and bimorph cantilevers has been discussed and the optimized length has been calculated. An analytical method is developed to compute the resonance frequencies of different beam shapes whose results are in a good agreement with numerical simulations.