Abstract
Frequency-scanning interferometry is a very useful absolute distance and areal surface profile measurement technique as it generates absolute optical path difference without any mechanical scanning. It is thus critical to select an appropriate algorithm to precisely and rapidly acquire the phase with respect of the wavenumber and optical path difference of the interference fringe. In this paper we analyze and demonstrate in detail the processing speed and accuracy of current optical path difference calculation algorithms. It is pointed out that the algorithm based on Fourier transform - inverse Fourier transform has the highest performance in terms of calculation time and overall noise insensitivity, while the phase shifting algorithm has the highest calculation accuracy when noise level is low.
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