Abstract
SAW technology is used to detect presence of certain molecules as used for gas sensing. Different geometries are designed with variation in number of interdigitated electrodes. Designed device used the layers of materials with variation of depth. FEM analysis is performed for two different structures. Shift in resonant frequency is observed as performance measuring parameter. Deformed shape plots are obtained with electric potential distributions for different eigenfrequencies. Different simulation results are compared to get highly sensitive device. Applications are found in many applications to sense micro, nano particles etc.
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