Performance Analysis of Microelectromechanical System Based Displacement Amplification Mechanism

Abstract

Design and analysis of microelectromechanical system based displacement amplification mechanism (MDAM) using analytical and finite element method is presented in this paper. The mechanism consists of side masses, microflexures, and microhinges with one end constrained and the other free. The MDAM acts as a displacement amplification device in a direction perpendicular to the applied displacement direction. The mechanism is modeled and analyzed using the Kane’s approach for solving kinematics, which is then used with Castigliano’s approach to develop a modified kinetic model. Modal and dynamic analyses of the mechanism are carried out to predict the natural frequencies and behavior of mechanism under application of dynamic loads. The extended finite element method (XFEM-using commercial software IntelliSuite®) is used for validation of mathematical models developed. Kinematic sensitivity and performance analysis of the proposed mechanism is carried out to predict the behavior of MDAM. Analyses results demonstrate the viability of mechanism as a displacement amplification device. An amplification factor of 10 is achieved. Effect of different performance parameters like width, length, angle, and thickness of flexures upon the output force and displacement is also part of this research work. Results predicted by analytical model and numerical simulations were found to be in close agreement. The MDAM can be used independently or in combination with other compliant mechanisms to amplify displacements. This amplification mechanism can be integrated with any conventional actuation as well as sensing mechanism in a microsystem where amplified displacement is desired for improved sensitivity and performance.